Four de recuit rapide 1900°C

1900°C Rapid Thermal Process furnace

Our engineering expertise in heating, atmosphere management, vacuum management, mechanical transfers, automation and regulation enables us to provide you with a solution that is perfectly adapted to your needs.
We adapt to your expectations by providing you with numerous solutions for research laboratories or industrial production.

All our equipment is CE compliant and is manufactured with materials that comply with current legislation.

 

 

Specifications
Options
Specifications (Fr) Specifications (Eng)

Atmosphère de travail

Process

Air

Atmosphère contrôlé

vide 

*selon température et chambre process

Air 

Controlled atmosphere

vacuum

*depending on temperature and process chamber

Température Maximale

Maximum processing temperature

Jusqu’à 2200°C

Up to 2200°C

Chambre Process selon température

Chamber process

Métallique, quartz, SiC, céramique ou graphite

Metallic, quartz, SiC, ceramic or graphite

Type de gaz process possible*

Process gas type*

 

*sous réserve compatibilité matériaux, gaz, température

*subject to material, gas and temperature compatibility

Air, 

azote N2, 

argon Ar, 

Hydrogène H2

 

Autre gaz réducteur sur demande

Air, 

Nitrogen N2, 

argon Ar, 

hydrogen H2

 

Other reducing gases on request

Pression chambre process possible

Process chamber pressure

Balayage gazeux en légère surpression

Régulation de pression inférieur à la Pression Atmosphérique

Sous vide

Gas sweep in slight overpressure

Pressure regulation below atmospheric pressure

Vacuum

Dimensionnement volume utile

Sizing

Jusqu’à 50L

Up to 50L

Volume autre

Further sizing

Sur consultation
Upon request

Déplacement de la cloche

Top Hat movement

Manuel ou motorisé
Manual or motorised

Déplacement du four

Furnace movement

Manuel ou motorisé

Manual or motorised

Inclus

Included

Régulateur programmateur classe 0.1

Programmable controller class 0.1

Sécurité

Security

Détection de surchauffe

Overheating detection

Ouverture porte

Furnace opening

Specifications (Fr) Specifications (Eng)

Multiprogramme + enregistreur

Multiprogram + recorder

Supervision

HM sur pc standard

HCI on standard PC

Autres options

Gaz sec ou humide : régulation point de rosée

Dry or wet gas: dew point control

Examples

 

1900°C Rapid Thermal Process furnace 

 

Application : procédé recuit rapide sur wafer SiC
Atmosphère de travail

process

Vide secondaire ou gaz neutre High vacuum or neutral gas
Température Maximale

Maximum temperature

1900°C 1900°C
Montée en température

Temperature rise speed

Jusqu’à 2°C/s Up to 2°C/s
Enceinte

Chamber

Métallique refroidie Cooled metal
Isolation et élément chauffant

Insulation & heating element

Graphite Graphite
Dimension zone utile (Ø x H mm)

Sizing

150 x 50 mm 150 x 50 mm
Déplacement de la cloche

Top hat movement

Motorisé Motorised
Déplacement du four

Furnace movement

Motorisé Motorised
Pilotage

Control

IHM sur pc standard HCI on standard PC
Four de recuit rapide 1900°C

The group

 

We are able to offer our clients an end-to-end approach thanks to our technical skills and the experience of our teams.

A 360° value proposition in thermal equipment for research laboratories and industry

 

Standard equipment solutions for laboratories and industry

 

A unique and advanced technological solution dedicated to the oxidation phase involved in the manufacture of VCSELs

 

Want to know more?

 

Contact our team

 

Get precise information about our services.