Rapid Thermal Process furnace 1900°C and controled atmosphere furnace 1100°C

Our engineering expertise in heating, atmosphere management, vacuum management, mechanical transfers, automation and regulation enables us to provide you with a solution that is perfectly adapted to your needs.
We adapt to your expectations by providing you with numerous solutions for research laboratories or industrial production.

All our equipment is CE compliant and is manufactured with materials that comply with current legislation.



Caractéristiques (Fr) Specifications (Eng)

Atmosphère de travail*



Atmosphère contrôlé


*selon température et chambre process


Controlled atmosphere


*depending on temperature and process chamber

Température Maximale

Maximum temperature

Jusqu’à 2200°C

Up to 2200°C

Chambre Process selon température

Chamber process

Métallique, quartz, SiC, céramique ou graphite

Metallic, quartz, SiC, ceramic or graphite

Type de gaz process possible*

Process gas type*


*sous réserve compatibilité matériaux, gaz, température

*subject to material, gas and temperature compatibility


azote N2, 

argon Ar, 

Hydrogène H2


Autre gaz réducteur sur demande


Nitrogen N2, 

argon Ar, 

hydrogen H2


Other reducing gases on request

Pression chambre process possible

Process chamber pressure

Balayage gazeux en légère surpression

Régulation de pression inférieur à la Pression Atmosphérique

Sous vide

Gas sweep in slight overpressure

Pressure regulation below atmospheric pressure


Dimensionnement volume utile


Jusqu’à 50L

Up to 50L

Volume autre

Further sizing

Sur consultation
Upon request

Déplacement de la cloche

Top Hat movement

Manuel ou motorisé
Manual or motorised

Déplacement du four

Furnace movement

Manuel ou motorisé

Manual or motorised



Régulateur programmateur classe 0.1

Programmable controller class 0.1



Détection de surchauffe

Overheating detection

Ouverture porte

Furnace opening

Caractéristiques (Fr) Specifications (Eng)
Régulation point de rosée 

Dry or wet gas: dew point control

Vide primaire ou secondaire

Medium or High vacuum

Gaz process : oxydant, neutre, hydrogéné, autres selon besoin
Process gas: oxidizing, neutral, hydrogenated, further gas as needed


Rapid Thermal Process furnace 1900°C with polymerization furnace


Four 1 Recuit rapide (RTP) Rapid Thermal Process
Atmosphère de travail


Vide secondaire ou gaz neutre High vacuum or neutral gas
Température Maximale

Maximum temperature

1900°C 1900°C
Montée en température

Temperature rise speed

Jusqu’à 2°C/s Up to 2°C/s


Métallique refroidie Cooled metal
Isolation et élément chauffant

Insulation & heating element

Graphite Graphite
Dimension zone utile (Ø x H mm)


150 x 50 mm 150 x 50 mm
Déplacement de la cloche

Top hat movement

Motorisé Motorised
Déplacement du four

Furnace movement

Motorisé Motorised


IHM sur pc standard HCI on standard PC
Four 2  Four multi-zone de pyrolyse  Multi-zone pyrolysis furnace 
Atmosphère de travail



Gaz neutre

Vide secondaire


Neutral gas

High vacuum

Température Maximale

Maximum temperature

900°C 900°C
Montée en température

Temperature rise speed

Jusqu’à 15°C/min Up to 15°C/min
Chambre process

process Chamber

Quartz Quartz
Dimension chambre (Ø x H mm)

Chamber sizing

170 x 300 170 x 300

The group


We are able to offer our clients an end-to-end approach thanks to our technical skills and the experience of our teams.

A 360° value proposition in thermal equipment for research laboratories and industry


Standard equipment solutions for laboratories and industry


A unique and advanced technological solution dedicated to the oxidation phase involved in the manufacture of VCSELs


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