Multiprocess & rapid thermal annealing (RTA) furnace up to 1000°C

Multi-process tubular furnace up to 1000°C cleanroom compatible. Our engineering expertise in heating, atmosphere management, vacuum management, mechanical transfers, automation and regulation enables us to provide you with a solution that is perfectly adapted to your needs.
We adapt to your expectations by providing you with numerous solutions for research laboratories or industrial production.

All our equipment is CE compliant and is manufactured with materials that comply with current legislation.

All our solutions

Caractéristiques

	Caractéristiques (Fr)	Specifications (Eng)
Thermal characteristics	Température maximale d’utilisation : 1000 °C Vitesse maximale : 40°C/s Vitesse de refroidissement maximale : 3°C/s Homogénéité sur zone utile : < ± 1 °C sur le volume utile avec suscepteur Zone utile : 110 mm x 150 mm	Maximum operating temperature: 1000 °C Maximum heating rate: 40 °C/s Maximum cooling rate: 3 °C/s Uniformity over the usable zone: < ± 1 °C over the usable volume with susceptor Usable zone: 110 mm × 150 mm
Laboratory tube (quartz or metal)	Ø intérieur : 160 mm	Internal diameter: 160 mm
Atmospheric characteristics	Vide primaire ou vide secondaire jusqu’à 10⁻⁷ mbar Four étanche : taux de fuite 5.10-8 mbar.l/s	Primary vacuum or secondary vacuum down to 10⁻⁷ mbar Gas-tight furnace: leak rate 5 × 10⁻⁸ mbar·l/s
Overall dimensions of the equipment	Longueur porte ouverte : 1600 mm Longueur porte fermée : 1100 mm Largeur : 600 mm Hauteur : 1500 mm Hauteur du plan de chargement : 1100 mm	Length with door open: 1600 mm Length with door closed: 1100 mm Width: 600 mm Height: 1500 mm Loading height: 1100 mm
Electrical characteristics	Alimentation générale : 400 V triphasé + neutre + terre Puissance de chauffage installée : jusqu’à 66kW	Main power supply: 400 V three-phase + neutral + earth Installed heating power: up to 66 kW

Multi-process tubular furnace up to 1000°C cleanroom compatible

This equipment is designed to operate at 1000°C in an inert atmosphere to apply heat treatments simulating a CIC cycle to small metal blocks. The resistive heating element is of the monozone type, placed at the outer periphery of the quartz tube. It is also made up of curved resistors moulded in thermal insulation, giving the furnace good insulation and low thermal inertia. This tubular furnace, which is able to reach temperatures of up to 1000°C, provides many advantages, particularly for applications requiring precise, flexible heat treatment. In addition, the AET Technologies supervision software includes all the essential supervision functions: curve plotting, history, alarms, file exchanges and data recording.