Rapid Thermal Process Furnace 1000°C on metallic specimen/test piece

Our engineering expertise in heating, atmosphere management, vacuum management, mechanical transfers, automation and regulation enables us to provide you with a solution that is perfectly adapted to your needs.
We adapt to your expectations by providing you with numerous solutions for research laboratories or industrial production.

All our equipment is CE compliant and is manufactured with materials that comply with current legislation.



Caractéristiques (Fr) Specifications (Eng)

Atmosphère de travail



Atmosphère contrôlé


*selon température et chambre process


Controlled atmosphere


*depending on temperature and process chamber

Température Maximale

Maximum processing temperature

Jusqu’à 2200°C

Up to 2200°C

Chambre Process selon température

Chamber process

Métallique, quartz, SiC, céramique ou graphite

Metallic, quartz, SiC, ceramic or graphite

Type de gaz process possible*

Process gas type*


*sous réserve compatibilité matériaux, gaz, température

*subject to material, gas and temperature compatibility


azote N2, 

argon Ar, 

Hydrogène H2


Autre gaz réducteur sur demande


Nitrogen N2, 

argon Ar, 

hydrogen H2


Other reducing gases on request

Pression chambre process possible

Process chamber pressure

Balayage gazeux en légère surpression

Régulation de pression inférieur à la Pression Atmosphérique

Sous vide

Gas sweep in slight overpressure

Pressure regulation below atmospheric pressure


Dimensionnement volume utile


Jusqu’à 50L

Up to 50L

Volume autre

Further sizing

Sur consultation
Upon request

Déplacement de la cloche

Top Hat movement

Manuel ou motorisé
Manual or motorised

Déplacement du four

Furnace movement

Manuel ou motorisé

Manual or motorised



Régulateur programmateur classe 0.1

Programmable controller class 0.1



Détection de surchauffe

Overheating detection

Ouverture porte

Furnace opening

Caractéristiques (Fr) Specifications (Eng)

Autres options

Régulation point de rosée 

Dry or wet gas: dew point control

Vide primaire ou secondaire

Medium or High vacuum

Gaz process : oxydant, neutre, hydrogéné, autres selon besoin
Process gas: oxidizing, neutral, hydrogenated, further gas as needed


Rapid Thermal Process Furnace 1000°C on metallic specimen/test piece


Atmosphère de travail



Atmosphère contrôlée



Controlled atmosphere


Zones de chauffe

Heating zones

3 3


Recuit rapide, oxydation Rapid thermal process, oxidation
Type de chambre process

Process chamber type

Quartz Quartz
Température Maximale

Maximum temperature

1000°C 1000°C
Taille maximale éprouvette

Maximum specimen size 

250mm x 130mm 250mm x 130mm
Vitesse de montée maximale

Maximum rise speed

sur échantillon : 25°C/s

Four vide : 80°C/s

on specimen : 25°C/s

Empty furnace : 80°C/s 

Homogénéité thermique

Thermal homogeneity

± 5° ± 5°
Ø tube laboratoire

Ø laboratory tube

150mm 150mm

The group


We are able to offer our clients an end-to-end approach thanks to our technical skills and the experience of our teams.

A 360° value proposition in thermal equipment for research laboratories and industry


Standard equipment solutions for laboratories and industry


A unique and advanced technological solution dedicated to the oxidation phase involved in the manufacture of VCSELs


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